APA (7th ed.) Citation

May, G. S., & Sze, S. M. (2004). Fundamentals of semiconductor fabrication. John Wiley & Sons, Inc.

Chicago Style (17th ed.) Citation

May, Gary S., and Simon M. Sze. Fundamentals of Semiconductor Fabrication. New Jersey: John Wiley & Sons, Inc, 2004.

MLA (9th ed.) Citation

May, Gary S., and Simon M. Sze. Fundamentals of Semiconductor Fabrication. John Wiley & Sons, Inc, 2004.